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Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering

來(lái)源:  華匯儀器   作者:  管理員   時(shí)間:  2021-09-20  點(diǎn)擊:   1033 次


Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering.pdf


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